Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and FilmsScience journal on Nano-technology, Materials engineering, Chemical sciences, Physical sciences, Biological sciences
Statisticstotal articles: 38
Academic publisher
American Vacuum Society
OECD field of science
Acronym
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
ISSN
Online: 0734-2101